Piezoresistive transducer with low drift output voltage

Details Piezoresistive transducer with low drift output voltage Piezoresistive transducer with low drift output voltage

1990-12-24

1991-12-24

Raevis, Robert

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

73708, G01L 100

Patent

active

050741527

ABSTRACT:
Leakage current is reduced in a piezoresistive transducer by forming a leakage barrier around a piezoresistive element of a piezoresistive transducer. The leakage barrier prevents the formation of a parasitic leakage path in the substrate thereby reducing the leakage current flowing through sections of the piezoresistive element, and stabilizing the resistance value and the output voltage of the piezoresistive transducer.

REFERENCES:
patent: 4771638 (1988-09-01), Sugiyama et al.

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