Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1982-10-04
1985-02-12
Hearn, Brian E.
Metal working
Method of mechanical manufacture
Assembling or joining
29583, 29610SG, 357 26, 357 55, 338 2, H01L 4108, G01L 122
Patent
active
044982291
ABSTRACT:
An electromechanical transducer is provided, and the process for making it, which utilizes a piezoresistive element or gage which is crystallinally the same as the base or substrate upon which it is supported. The gage of the invention is a force gage, and is derived from its substrate by etching in a series of steps which, ultimately, provide a gage with substantially reduced strain energy requirements, because the volume of the gage may be as small as 33.times.10.sup.10 cubic centimeters of stressed material. In its most preferred form, the element or gage is etched free of its substrate to provide, in effect, a "floating gage. " This is achieved by defining the gage in its substrate or in material rigidly bonded to its substrate, etching away immediately adjacent material, and leaving the gage free in space, while supported at each end on the substrate.
REFERENCES:
patent: 3351880 (1967-11-01), Wilner
patent: 3392358 (1968-07-01), Collins
patent: 3444499 (1969-05-01), Lovelace
patent: 3492513 (1970-01-01), Hollander
patent: 3897627 (1975-08-01), Klatskin
patent: 3995247 (1976-11-01), Kurtz
patent: 4047144 (1977-09-01), Wong
patent: 4067970 (1978-01-01), Wilner
patent: 4093933 (1978-06-01), Wilner
patent: 4408386 (1983-10-01), Takayashiki et al.
Becton Dickinson and Company
Grindle Robert P.
Hearn Brian E.
Hey David A.
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