Piezoresistive silicon pressure sensor manufacture implementing

Details Piezoresistive silicon pressure sensor manufacture implementing Piezoresistive silicon pressure sensor manufacture implementing

1996-08-09

1998-02-03

Dombroske, George M.

Measuring and testing

Fluid pressure gauge

Diaphragm

73720, 73727, 338 42, 296211, 437901, G01L 904

Patent

active

057146900

ABSTRACT:
A form pressure sensor diaphragm and method of making that allows for formation of long rectangular plate structures in semiconducting materials, especially silicon. A plurality or multiplicity of sensors may be constructed on a single chip, thus providing for absolute and relative sensing of pressure on a single device.

REFERENCES:
patent: 4359498 (1982-11-01), Mallon et al.
patent: 5029479 (1991-07-01), Bryan
patent: 5058435 (1991-10-01), Terry et al.
patent: 5295395 (1994-03-01), Hocker et al.
patent: 5320705 (1994-06-01), Fuji et al.
Burns, D.W.; Micromechanics of Integrated Sensors and the Planar Processed Pressure Transducer (PhD Thesis); University of Wisconsin; Madison, 1988.

Affiliated with

Also associated with

Rating

Piezoresistive silicon pressure sensor manufacture implementing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoresistive silicon pressure sensor manufacture implementing , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoresistive silicon pressure sensor manufacture implementing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-664262