Piezoresistive silicon pressure sensor implementing long diaphra

Details Piezoresistive silicon pressure sensor implementing long diaphra Piezoresistive silicon pressure sensor implementing long diaphra

1993-10-28

1996-01-23

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73726, 73721, 338 42, G01L 904

Patent

active

054857538

ABSTRACT:
A form of pressure sensor diaphragm and method of making that allows for the formation of long rectangular plate structures in semiconducting material, especially Silicon. A plurality or multiplicity of sensors may be constructed on a single chip, thus providing for absolute and relative sensing of pressure on a single device.

REFERENCES:
patent: 4359498 (1982-11-01), Mallon et al.
patent: 5029479 (1991-07-01), Bryan
patent: 5058435 (1991-10-01), Terry et al.
patent: 5285690 (1994-02-01), Koen et al.
patent: 5291788 (1994-03-01), Oohata et al.
Burns, "A thesis submitted in partial fulfillment of requirements for the degree of Doctor of Philosophy (Material Science)", 1988.

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