Piezoresistive sensor bridge having overlapping diffused regions

Details Piezoresistive sensor bridge having overlapping diffused regions Piezoresistive sensor bridge having overlapping diffused regions

1995-02-27

2000-11-21

Easthom, Karl D.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

338 42, 29621, 296211, G01L 122

Patent

active

061509175

ABSTRACT:
A piezoresistive pressure sensor (30) has four resistive diffused regions (32) coupled into a bridge configuration (33) with four junctions (36) and four inside corners (40). Each of the diffused regions has a first end connected to one of the four junctions and a second end connected to a different one of the four junctions. There are four contact diffusion terminals (34) disposed in contact with the bridge configuration, and each of the diffusion terminals is disposed at one of the four junctions such that the diffused regions are electrically connected essentially only by the contact diffusion terminals and an overlap (44, 46) is provided between each of the diffusion terminals and the inside corners to accommodate mask misalignment during manufacture. Thus, no tap is required to electrically connect the contact diffusion terminals to the resistive diffused regions of the bridge, which results in increased sensor sensitivity.

REFERENCES:
patent: 3270554 (1966-09-01), Pfann
patent: 3701056 (1972-10-01), Ozawa et al.
patent: 3916365 (1975-10-01), Giachino
patent: 4315236 (1982-02-01), Tominaga et al.
patent: 4620365 (1986-11-01), Burger et al.
patent: 4869107 (1989-09-01), Murakami
patent: 5198794 (1993-03-01), Sato et al.

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