Piezoresistive device and fabrication method thereof

Details Piezoresistive device and fabrication method thereof Piezoresistive device and fabrication method thereof

1996-09-19

1998-06-02

Walberg, Teresa J.

Electrical resistors

Strain gauge type

338 42, 338 4, 338 36, 338 47, G01L 122

Patent

active

057606757

ABSTRACT:
Disclosed is the method of producing a piezo-device utilizing an ultra-thin Mo-C film as a piezoresistive material for a general class of improved piezo-device with the high sensitivity and the weak temperature dependence.

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patent: 5581226 (1996-12-01), Shah
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