Piezoresistive accelerometer with enhanced performance

Details Piezoresistive accelerometer with enhanced performance Piezoresistive accelerometer with enhanced performance

1993-06-16

1995-06-20

Powell, William

Etching a substrate: processes

Forming or treating electrical conductor article

Forming or treating resistive material

216 99, H01L 21306, B44C 122

Patent

active

054258413

ABSTRACT:
An electromechanical transducer is provided, and the process for making it utilizes a piezoresistive element or gage which is dielectrically isolated from a gap spanning member and substrate upon which it is supported. The gage of the invention is a force gage and is derived from a sacrificial wafer by a series of etching and bonding steps which ultimately provide a gage with substantially reduced strain energy requirements.

REFERENCES:
patent: 4624741 (1986-11-01), Daniele
patent: 5264075 (1993-11-01), Zanini-Fisher et al.
patent: 5310450 (1994-05-01), Offenberg et al.

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