Measuring and testing – Speed – velocity – or acceleration – Temperature compensator
Patent
1982-02-02
1984-02-14
Goldberg, Gerald
Measuring and testing
Speed, velocity, or acceleration
Temperature compensator
73517R, 338 43, G01P 1512
Patent
active
044308957
ABSTRACT:
A piezoresistive acceleration sensing transducer is disclosed which enables low cost microcircuit construction of accelerometers. A silicon wafer is etched to form individual acceleration sensing elements each of which includes a mass ring suspended from a diaphragm and mounted to a center pedestal support portion. A plurality of piezoresistive strain gauges are located on the diaphragm about the periphery of the pedestal portion and are positioned to form a circuit for sensing strain produced in the diaphragm by movement of the mass ring in response to acceleration. A pair of temperature sensors are located in a zero-stress area of the diaphragm to compensate for temperature effects. In one embodiment, the gauges are coupled in a bridge circuit to provide a measure of acceleration in one axis only. In another embodiment, the mass ring is modified to locate its center of mass above the plane of the diaphragm so that the mass ring responds to acceleration in three axes. Selected outputs from the strain gauges are then used to provide a measurement of acceleration in each of the three axes.
REFERENCES:
patent: 3023627 (1960-03-01), Geyling
patent: 4050049 (1977-09-01), Youmans
patent: 4306456 (1981-12-01), Maerfeld
patent: 4333349 (1982-06-01), Mallon et al.
"IC Accelerometer", Electronic Design 4 (Feb. 15, 1978), pp. 36-37.
Chapman, Jr. John E.
Goldberg Gerald
Hamann H. Fredrick
Montanye George A.
Rockwell International Corporation
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