Piezoresistance paste and mechanical sensor using the same

Details Piezoresistance paste and mechanical sensor using the same Piezoresistance paste and mechanical sensor using the same

1998-02-26

1999-11-16

Gassaway, D.

Compositions

Electrically conductive or emissive compositions

Metal compound containing

25251914, 2525193, 2525214, 73776, 73777, 428 346, H01B 106, G01B 716, A47G 1922

Patent

active

059851830

ABSTRACT:
The present invention provides a mechanical sensor high in sensitivity (GF) and reliability. The mechanical sensor comprises an insulating substrate, a pair of electrodes formed on the insulating substrate, and a piezoresistance element formed by connecting the electrodes. The piezoresistance element is substantially made of a glass of the PbO--SiO.sub.2 --B.sub.2 --O.sub.3 --Al.sub.2 O.sub.3 system comprising 73.1 to 86.7 wt % of PbO, 9.7 to 22.2 wt % of SiO.sub.2, 2.5 to 5.0 wt % of B.sub.2 O.sub.3 and 0.9 to 3.6 wt % of Al.sub.2 O.sub.3 and a ruthenium oxide powder dispersed in the glass. The piezoresistance element is formed by coating and baking a paste containing the ruthenium oxide powder, a powder of the glass and an organic binder.

REFERENCES:
patent: 4452726 (1984-06-01), Palanisamy et al.
patent: 4693843 (1987-09-01), Kasanami et al.
patent: 5242722 (1993-09-01), Hiraka et al.
patent: 5379016 (1995-01-01), Smith et al.
patent: 5474711 (1995-12-01), Borland et al.
patent: 5534194 (1996-07-01), Borland et al.
patent: 5914559 (1999-06-01), Muchi et al.

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