Piezoelectrics oscillator, sensor, and multi-sensor

Details Piezoelectrics oscillator, sensor, and multi-sensor Piezoelectrics oscillator, sensor, and multi-sensor

2008-03-21

2010-02-09

SanMartin, J. (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000, C310S332000, C310S328000, C310S367000, C310S324000, C073S862000

Reexamination Certificate

active

07659654

ABSTRACT:
A piezoelectric oscillator includes: a piezoelectric substrate having at least a vibrating part and a base part; an excitation electrode formed on the vibrating part; and an oscillation circuit formed on the base part. In the piezoelectric oscillator, the oscillation circuit includes a thin film transistor made of one of polysilicon and monocrystalline silicon and is coupled to the excitation electrode.

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