Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-04-24
2009-10-13
Dougherty, Thomas M (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S311000, C310S328000, C310S365000
Reexamination Certificate
active
07602105
ABSTRACT:
A compact large density memory piezoactuated storage device and process for its fabrication provides an integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure that features an integrated large density array of nanotips made of wear-resistant conductive ultrananocrystalline diamond (UNCD) in which the tips are actuated via a piezoelectric thin film integrated with the UNCD tips. The tips of the special piezoactuated storage device effectively contact an underlying metal layer (top electrode) deposited on a polarizable ferroelectric layer that is grown on top of another metal layer (bottom electrode) to form a ferroelectric capacitor. Information is imprinted in the ferroelectric layer by the polarization induced by the application of a voltage pulse between the top and bottom electrodes through the conductive UNCD tips. This integrated microelectromechanical (MEMS) and/or nanoelectromechanical (NEMS) system and structure can be efficiently used to imprint data in the ferroelectric layer for memory storage with high density in the gigabit (Gb) to terabit (Tb) range. An alternative memory media to the ferroelectric layer can be a phase change material that exhibits two orders of magnitude difference in electrical resistance between amorphous and crystalline phases.
REFERENCES:
patent: 6613601 (2003-09-01), Krauss et al.
patent: 2002/0149019 (2002-10-01), Iwashita et al.
patent: 2007/0220959 (2007-09-01), Sumant et al.
patent: 2008/0310052 (2008-12-01), Strom
patent: 2009/0116367 (2009-05-01), Gidon
Publication: Takayuki Shibata, et al., “Diamond AFM Probe with Piezoelectric Sensor and Actuator”, Transducers '03, The 12thInternational Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, pp. 500-503.
Dougherty Thomas M
Tolpin Thomas W.
Tolpin & Partners, PC
UChicago Argonne LLC
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