Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-11-14
2006-11-14
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S291000, C359S221200, C359S850000, C073S105000, C250S338100, C250S306000, C029S025350, C361S278000, C204S192340
Reexamination Certificate
active
07136215
ABSTRACT:
A piezoelectric spatial light modulator including a substrate having an array of cavities and piezoelectric cantilevers is arranged on the substrate. Each of the piezoelectric cantilevers includes a base portion on the substrate and a beam portion extending over a respective one of the cavities. Each of the piezoelectric cantilevers further includes a first electrode, a second electrode and a piezoelectric element between the electrodes. A flexible layer covers the cavities and the piezoelectric cantilevers and reflective elements are each located on the flexible layer over a respective one of the beam portions.
REFERENCES:
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4441791 (1984-04-01), Hornbeck
patent: 4596992 (1986-06-01), Hornbeck
patent: 4615595 (1986-10-01), Hornbeck
patent: 4710732 (1987-12-01), Hornbeck
patent: 4728185 (1988-03-01), Thomas
patent: 5079544 (1992-01-01), DeMond et al.
patent: 5245863 (1993-09-01), Kajimura et al.
patent: 5260926 (1993-11-01), Kuroda et al.
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5442414 (1995-08-01), Janssen et al.
patent: 5610773 (1997-03-01), Min
patent: 5627673 (1997-05-01), Min
patent: 6249269 (2001-06-01), Blalock et al.
patent: 6329974 (2001-12-01), Walker et al.
patent: 6377438 (2002-04-01), Deane et al.
patent: 6379510 (2002-04-01), Kane et al.
patent: 6420706 (2002-07-01), Lurie et al.
patent: 6895645 (2005-05-01), Xu et al.
patent: 2005/0104478 (2005-05-01), Xu et al.
patent: 2005/0224687 (2005-10-01), Heertjes et al.
U.S. Appl. No. 10/792,777, filed Mar. 5, 2002, Amano.
Amano Jun
Machida Akihiro
Avago Technologies Fiber (IP) Singapore Pte. Ltd.
Ben Loha
LandOfFree
Piezoelectrically-activated cantilevered spatial light... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Piezoelectrically-activated cantilevered spatial light..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectrically-activated cantilevered spatial light... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3656452