1978-12-08
1981-02-03
Sikes, William L.
G02F 103
Patent
active
042485045
ABSTRACT:
A piezoelectric wavefront modulator employs a plurality of widely-separated posts, which are formed upon the upper portion of a monolithic piezoelectric medium and are affixed to the lower portion of a flexible mirror. The posts extend from the top surface of the piezoelectric medium a sufficient distance, so that the mirror floats. The posts are surrounded by moats formed within the medium, which are configured to produce a highly sensitive device, wherein the post mirror actuators are substantially electromechanically isolated from each other, but not from the piezoelectric material adjacent the moat.
REFERENCES:
patent: 3746785 (1973-07-01), Goodrich
patent: 3904274 (1975-09-01), Feinleib et al.
patent: 4016415 (1977-04-01), O'Meara
Albertinetti Nedo P.
Aldrich Ralph E.
Blair Homer O.
Glanzman Gerald H.
Itek Corporation
Nathans Robert L.
Sikes William L.
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