Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-01-18
2011-01-18
SanMartin, J. (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S364000, C310S370000
Reexamination Certificate
active
07872401
ABSTRACT:
There is provided a piezoelectric vibrator1that includes a base substrate2, a lid substrate3, a piezoelectric vibrating reed4, a pair of external electrodes38and39, a pair of through electrodes32and33, and routing electrodes36and37. Both surfaces of the base substrate2are polished. The lid substrate3includes a recess3afor a cavity C and is bonded to the base substrate. The piezoelectric vibrating reed4is bonded to the upper surface of the base substrate so as to be received in a cavity that is formed between the base substrate and the lid substrate. The pair of external electrodes38and39is formed on the lower surface of the base substrate. The pair of through electrodes32and33is formed so as to pass through the base substrate, maintains airtightness in the cavity, and is electrically connected to the pair of external electrodes, respectively. The routing electrodes36and37are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the bonded piezoelectric vibrating reed. The through electrodes are formed by the hardening of paste that contains a plurality of nonspherical metal fine particles.
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International Search Report for International Application No. PCT/JP2008/072621, dated Feb. 24, 2009, 3 pages.
Kurita Sumihiko
Onitsuka Osamu
Sugama Kazuyoshi
Brinks Hofer Gilson & Lione
SanMartin J.
Seiko Instruments Inc.
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