Piezoelectric vibrating pieces, and piezoelectric vibrators...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Reexamination Certificate

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08076830

ABSTRACT:
Piezoelectric vibrating pieces are disclosed that include a base portion and first and second vibrating arms extending in a longitudinal direction from the base portion. Each vibrating arm has first and second main surfaces, a first groove on the first main surface, and a second groove on the second main surface. The grooves extend in the longitudinal. By adjusting the length and shapes of at least the first grooves relative to each other, the rigidity of the vibrating arms can be balanced and adverse effects of deformed regions between the vibrating arms caused by anomalous etching can be reduced.

REFERENCES:
patent: 6587009 (2003-07-01), Kitamura et al.
patent: 7084556 (2006-08-01), Dalla Piazza et al.
patent: 7352117 (2008-04-01), Kawanishi et al.
patent: 7397172 (2008-07-01), Kikushima
patent: 7659798 (2010-02-01), Yamada
patent: 2003-133895 (2003-05-01), None
patent: 2004-236008 (2004-08-01), None
patent: 2004-350015 (2004-12-01), None
patent: 2006-148856 (2006-06-01), None
patent: 2006-340392 (2006-12-01), None
Office action for related Japanese Application No. 2008-330206, dated Mar. 23, 2011, 4 pages.

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