Piezoelectric tuning fork resonator and method of manufacturing

Details Piezoelectric tuning fork resonator and method of manufacturing Piezoelectric tuning fork resonator and method of manufacturing

1993-05-20

1994-04-12

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310346, 310367, H01L 4108

Patent

active

053028805

ABSTRACT:
A piezoelectric tuning fork resonator having a piezoelectric substrate provided with a stepped portion on its end and a tuning fork arm portion formed in the stepped portion. A dummy substrate is arranged adjacent to a side of the piezoelectric substrate and a pair of sealing substrates are pasted onto upper and lower portions of the piezoelectric substrate and the dummy substrate to form a chip type piezoelectric tuning fork resonator. In another embodiment piezoelectric substrate includes a resin sealing portion having a hollow portion defined around the tuning fork arm portion so as to form a resin-coated piezoelectric tuning fork resonator.

REFERENCES:
patent: 4365181 (1982-12-01), Yamamoto
patent: 4451753 (1984-05-01), Ogawa et al.
patent: 4920296 (1990-04-01), Takahashi et al.
patent: 4926086 (1990-05-01), Bourgeois et al.
patent: 5159301 (1992-10-01), Kaida et al.

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