Piezoelectric thin film vibrator and fabrication method...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C310S323040, C029S025350

Reexamination Certificate

active

07608981

ABSTRACT:
The invention relates to a piezoelectric thin film vibrator having a piezoelectric device formed by using thin film formation technology, a fabrication method thereof, a driving apparatus and a piezoelectric motor using the same, and an object is to provide a piezoelectric thin film vibrator which can provide an excellent piezoelectric characteristic at low cost, a fabrication method thereof, a driving apparatus and a piezoelectric motor using the same. A piezoelectric thin film vibrator is configured to have a resonator which generates a flexure traveling wave, a lower electrode which is formed on the resonator, a piezoelectric thin film which is formed by epitaxial growth on the lower electrode, and a plurality of upper electrode parts which is formed on the piezoelectric thin film.

REFERENCES:
patent: 4779019 (1988-10-01), Onishi et al.
patent: 4786836 (1988-11-01), Tokushima
patent: 5056201 (1991-10-01), Kasuga et al.
patent: 5814919 (1998-09-01), Okumura
patent: 6215375 (2001-04-01), Larson, III et al.
patent: 6690100 (2004-02-01), Koroishi et al.
patent: 7005776 (2006-02-01), Iino et al.
patent: 7034438 (2006-04-01), Ohashi et al.
patent: 2002/0014810 (2002-02-01), Maruyama
patent: 2002/0195892 (2002-12-01), Okamoto et al.
patent: 2006/0055486 (2006-03-01), Nakatsuka et al.
patent: 2006/0131999 (2006-06-01), Nitto et al.
patent: 2006/0244341 (2006-11-01), Uchino et al.
patent: 2008/0076211 (2008-03-01), Casset et al.
patent: 01043077 (1989-02-01), None
patent: 01209963 (1989-08-01), None
patent: 01227670 (1989-09-01), None
patent: 02151278 (1990-06-01), None
patent: 03164077 (1991-07-01), None
patent: 07143765 (1995-06-01), None
patent: A-09-223824 (1997-08-01), None
patent: 11289782 (1999-10-01), None
patent: A-2000-332568 (2000-11-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Piezoelectric thin film vibrator and fabrication method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric thin film vibrator and fabrication method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin film vibrator and fabrication method... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4121614

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.