Piezoelectric thin film resonator, piezoelectric thin film...

Details Piezoelectric thin film resonator, piezoelectric thin film... Piezoelectric thin film resonator, piezoelectric thin film...

2007-02-12

2010-06-29

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C367S068000, C367S070000

Reexamination Certificate

active

07745975

ABSTRACT:
A piezoelectric thin film resonator includes: a piezoelectric thin film; a laminated structure which includes a first metal electrode film and a second metal electrode film that interpose at least a part of the piezoelectric thin film, and which is formed on a substrate; and an acoustic insulating layer which is formed on the substrate at a position corresponding to the laminated structure, wherein the first metal electrode film is formed on the substrate and the second metal electrode film is formed on the first metal electrode film while sandwiching the piezoelectric thin film, and a protection film laminated on the second metal electrode film is provided so as to cover the second metal electrode film.

REFERENCES:
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patent: 7235915 (2007-06-01), Nakamura et al.
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patent: 2006-332730 (2006-12-01), None
“Comparison of Micromachined FBAR Band Pass Filters with Different Structural Geometry”, Park et al, 2003 IEEE MTT-S Digest, pp. 2005-2008.

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