Piezoelectric thin-film resonator, piezoelectric filter, and...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C310S346000

Reexamination Certificate

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11004687

ABSTRACT:
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.

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