Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-02-21
2006-02-21
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C310S322000
Reexamination Certificate
active
07002437
ABSTRACT:
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.
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Kawamura Hideki
Nakamura Daisuke
Takeuchi Masaki
Yamada Hajime
Yoshino Yukio
Keating & Bennett, Ltd.
Murata Manufacturing Co. Ltd.
Summons Barbara
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