Piezoelectric thin film resonator, filter, and communication...

Details Piezoelectric thin film resonator, filter, and communication... Piezoelectric thin film resonator, filter, and communication...

2009-03-04

2011-12-27

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S133000, C310S324000, C310S365000

Reexamination Certificate

active

08085115

ABSTRACT:
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

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