Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-11-10
2008-10-14
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000, C310S334000
Reexamination Certificate
active
07436102
ABSTRACT:
A method for producing a piezoelectric thin-film resonator includes forming a sacrificial layer on a substrate, performing a plasma treatment on the sacrificial layer so that the surface roughness (Ra) of end surface portions of the sacrificial layer is about 5 nm or less, forming a strip-shaped dielectric film so as to be continuously disposed on the surface of the substrate and the end surface portions and the principal surface of the sacrificial layer, forming a piezoelectric thin-film area including a lower electrode, an upper electrode, and a piezoelectric thin-film disposed therebetween so that a portion of the lower electrode and a portion of the upper electrode surface each other at an area on the dielectric film, the area being disposed on the upper portion of the sacrificial layer, and removing the sacrificial layer to form an air-gap between the substrate and the dielectric film.
REFERENCES:
patent: 6842088 (2005-01-01), Yamada et al.
patent: 7212082 (2007-05-01), Nagao et al.
patent: 06-040611 (1994-08-01), None
Fujii Hidetoshi
Kubo Ryuichi
Budd Mark
Keating & Bennett LLP
Murata Manufacturing Co. Ltd.
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