Piezoelectric thin-film resonator and filter using the same

Details Piezoelectric thin-film resonator and filter using the same Piezoelectric thin-film resonator and filter using the same

2008-11-22

2010-10-12

Benson, Walter (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S366000

Reissue Patent

active

RE041813

ABSTRACT:
A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.

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