Piezoelectric thin-film resonator and filter using the same

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C310S324000, C310S365000, C333S187000, C333S189000

Reexamination Certificate

active

07602101

ABSTRACT:
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and the substrate; and an upper electrode provided on the piezoelectric film so as to form a resonance portion in which the upper electrode faces the lower electrode across the piezoelectric film. At least one of the lower electrode and the upper electrode has an interconnection portion used to extract a signal from the resonance portion and located above the space. The at least one of the lower electrode and the upper electrode has a first mass per unit area in which the at least one of the lower electrode and the upper electrode contacts the piezoelectric film and a second mass per unit area in the resonance portion. The first mass per unit area is smaller than the second mass per unit area.

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ZnO/SiO2—Diaphragm Composite Resonator on a Silicon Wafer, Electronics Letters, Jul. 9, 1981, vol. 17, No. 14, pp. 507-509.

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