Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-10-25
2009-10-13
Dougherty, Thomas M (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000, C310S365000, C333S187000, C333S189000
Reexamination Certificate
active
07602101
ABSTRACT:
A piezoelectric thin-film resonator includes: a lower electrode supported by a substrate, a space being defined below the lower electrode; a piezoelectric film provided on the lower electrode and the substrate; and an upper electrode provided on the piezoelectric film so as to form a resonance portion in which the upper electrode faces the lower electrode across the piezoelectric film. At least one of the lower electrode and the upper electrode has an interconnection portion used to extract a signal from the resonance portion and located above the space. The at least one of the lower electrode and the upper electrode has a first mass per unit area in which the at least one of the lower electrode and the upper electrode contacts the piezoelectric film and a second mass per unit area in the resonance portion. The first mass per unit area is smaller than the second mass per unit area.
REFERENCES:
patent: 6396200 (2002-05-01), Misu et al.
patent: 6657363 (2003-12-01), Aigner
patent: 7199510 (2007-04-01), Umeki
patent: 7463117 (2008-12-01), Ohara et al.
patent: 7482737 (2009-01-01), Yamada et al.
patent: 7498717 (2009-03-01), Yokoyama et al.
patent: 2003/0107456 (2003-06-01), Nishihara et al.
patent: 2004/0017269 (2004-01-01), Gotoh et al.
patent: 2006/0048358 (2006-03-01), Morimura et al.
patent: 2008/0179995 (2008-07-01), Umeda et al.
patent: 2009/0033177 (2009-02-01), Itaya et al.
patent: 60-189307 (1985-09-01), None
patent: 2006-109402 (2006-04-01), None
patent: 2006-128993 (2006-05-01), None
patent: 2003-0035784 (2003-05-01), None
ZnO/SiO2—Diaphragm Composite Resonator on a Silicon Wafer, Electronics Letters, Jul. 9, 1981, vol. 17, No. 14, pp. 507-509.
Endo Go
Hara Motoaki
Nishihara Tokihiro
Ueda Masanori
Arent & Fox LLP
Dougherty Thomas M
Fujitsu LImited
Fujitsu Media Devices
LandOfFree
Piezoelectric thin-film resonator and filter using the same does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Piezoelectric thin-film resonator and filter using the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin-film resonator and filter using the same will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4075450