Piezoelectric thin-film resonator and filter using the same

Details Piezoelectric thin-film resonator and filter using the same Piezoelectric thin-film resonator and filter using the same

2008-03-18

2008-03-18

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S369000, C333S187000, C333S189000

Reexamination Certificate

active

11326418

ABSTRACT:
A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.

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