Piezoelectric thin-film resonator and filter using the same

Details Piezoelectric thin-film resonator and filter using the same Piezoelectric thin-film resonator and filter using the same

2008-03-18

2008-03-18

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S369000, C333S187000, C333S189000

Reexamination Certificate

active

07345402

ABSTRACT:
A piezoelectric thin-film resonator includes a film laminate formed on a device substrate, the film laminate including a lower electrode, a piezoelectric film provided on the device substrate and the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the upper and lower electrodes has an electrode leading portion that extends from an membrane in which the upper electrode overlaps with the lower electrode through the piezoelectric film and has a width narrower than that of the membrane.

REFERENCES:
patent: 4642508 (1987-02-01), Suzuki et al.
patent: 4720651 (1988-01-01), Nakazawa et al.
patent: 5185589 (1993-02-01), Krishnaswamy et al.
patent: 6150703 (2000-11-01), Cushman et al.
patent: 6346762 (2002-02-01), Watanabe et al.
patent: 6448699 (2002-09-01), Scepanovic et al.
patent: 6556103 (2003-04-01), Shibata et al.
patent: 7042137 (2006-05-01), Yoon
patent: 7183694 (2007-02-01), Nanataki et al.
patent: 2002/0030419 (2002-03-01), Suzuki et al.
patent: 2002/0130593 (2002-09-01), Lee et al.
patent: 2004/0174092 (2004-09-01), Iwata
patent: 2004/0183399 (2004-09-01), Nakatani et al.
patent: 2004/0245892 (2004-12-01), Yamada et al.
patent: 2005/0110369 (2005-05-01), Onishi et al.
patent: 2005/0218757 (2005-10-01), Yamaguchi et al.
patent: 2005/0269904 (2005-12-01), Oka
patent: 2007/0152540 (2007-07-01), Fujii et al.
patent: 57-80898 (1982-05-01), None
patent: 60-189307 (1985-09-01), None
patent: 62-76913 (1987-04-01), None
patent: 62-200813 (1987-09-01), None
patent: 63-187714 (1998-08-01), None
patent: 2000-69594 (2000-03-01), None
patent: 2002-314368 (2002-10-01), None
patent: 2003-204239 (2003-07-01), None
patent: 2003-273693 (2003-09-01), None
patent: 2004-032572 (2004-01-01), None
patent: 2006-197147 (2006-07-01), None
“ZnO/SiO2-Diaphragm Composite Resonator on a Silicon Wafer” Electronic Letters, Jul. 9, 1981, vol. 17, No. 14, pp. 507-509.
David Feld, Kun Wang, Paul Bradley, A High Performance 3.0 mm×3.0 mm×1.1 mm FBAR Full Band Tx Filter for U.S. PCS Handsets, S.M., IEEE, Andrew Barfknecht, Ba Ly, Richard Ruby Wireless Semiconductor Division, Agilent Technologies, Inc., Newark, CA., 94560, U.S.A., no date provided.

Affiliated with

Also associated with

Rating

Piezoelectric thin-film resonator and filter using the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric thin-film resonator and filter using the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin-film resonator and filter using the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2793306