Piezoelectric thin-film resonator

Details Piezoelectric thin-film resonator Piezoelectric thin-film resonator

2011-05-31

2011-05-31

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S321000, C310S329000, C310S365000, C333S187000

Reexamination Certificate

active

07952257

ABSTRACT:
There is provided a piezoelectric thin-film resonator including a substrate, a lower electrode disposed on the substrate, a piezoelectric film disposed on the lower electrode, an upper electrode disposed on the piezoelectric film in such a manner that a portion of the upper electrode is opposed to the lower electrode, and a mass element disposed on the upper electrode in a portion of an edge of the region of the upper electrode in which the upper electrode and the lower electrode are opposed to each other.

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