Piezoelectric thin film, method of manufacturing...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C347S068000

Reexamination Certificate

active

07399067

ABSTRACT:
There is disclosed a piezoelectric thin film having less non-uniform portions and holding satisfactory piezoelectric characteristics, a method of manufacturing the film, a piezoelectric element using the piezoelectric thin film, and an ink jet system recording head using the piezoelectric element. In the piezoelectric thin film of perovskite crystals formed on a substrate by a sol-gel process and represented by a general formula Pb(1-x)Lax(ZryTi1-y)O3(where 0≦x<1, 0.05≦y≦1), a film thickness of the thin film is 1000 nm or more and 4000 nm or less, and a difference between a maximum value and a minimum value of y in an arbitrary portion of the thin film is 0.05 or less.

REFERENCES:
patent: 5657063 (1997-08-01), Takahashi
patent: 6402304 (2002-06-01), Qiu et al.
patent: 6565997 (2003-05-01), Kashiwaya
patent: 6609783 (2003-08-01), Koyama et al.
patent: 6616258 (2003-09-01), Maeda
patent: 6688729 (2004-02-01), Imanaka et al.
patent: 6945633 (2005-09-01), Imanaka et al.
patent: 6960424 (2005-11-01), Miyagawa et al.
patent: 2004/0124482 (2004-07-01), Kobayashi et al.
patent: 2005/0082943 (2005-04-01), Kubota et al.
patent: 5-7029 (1993-01-01), None
patent: 9-92897 (1997-04-01), None
patent: 10-139594 (1998-05-01), None
patent: 10-290035 (1998-10-01), None
patent: 10-290035 (1998-10-01), None
patent: 2001/203401 (2001-07-01), None
patent: 2003/81694 (2003-03-01), None
Kumar et al., “Lead Zirconate Titanate Films by Rapid Thermal Processing,” Applied Physics Letter, vol. 58, No. 11, Mar. 18, 1991, pp. 1161-1163.
Office Action in Korean Application No. 2007-053057890 dated Sep. 28, 2007.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Piezoelectric thin film, method of manufacturing... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric thin film, method of manufacturing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin film, method of manufacturing... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2757868

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.