Piezoelectric thin film element

Details Piezoelectric thin film element Piezoelectric thin film element

2009-10-16

2011-11-15

Rosenau, Derek (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

08058779

ABSTRACT:
A piezoelectric thin film element includes a bottom electrode, a piezoelectric layer and a top electrode on a substrate. The piezoelectric layer includes as a main phase a perovskite-type oxide represented by (NaxKyLiz)NbO3(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1), and the bottom electrode includes a surface roughness of not more than 0.86 nm in arithmetic mean roughness Ra or not more than 1.1 nm in root mean square roughness Rms.

REFERENCES:
patent: 6347862 (2002-02-01), Kanno et al.
patent: 2006/0209128 (2006-09-01), Murai
patent: 2007/0024162 (2007-02-01), Shibata et al.
patent: 2007/0236104 (2007-10-01), Fujii
patent: 2008/0012909 (2008-01-01), Matsuda et al.
patent: 10-286953 (1998-10-01), None
patent: 2007-19302 (2007-01-01), None

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