Piezoelectric thin film element

Details Piezoelectric thin film element Piezoelectric thin film element

2008-01-29

2008-01-29

San Martin, J. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C347S068000, C347S070000, C347S071000, C347S072000, C501S134000, C252S06290R, C252S06290R, C257S347000

Reexamination Certificate

active

07323806

ABSTRACT:
A thin-film piezoelectric element has a substrate, a lower electrode, a piezoelectric portion, and an upper electrode that are sequentially formed on the substrate. The piezoelectric portion has a dielectric thin film that has an alkali niobium oxide-based perovskite structure expressed by general formula (NaxKyLiz)NbO3(0<x<1, 0<y<1, 0≦z<1, x+y+z=1), and a high voltage-withstand dielectric that has a dielectric strength voltage greater than that of the dielectric thin film.

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patent: 2004-260158 (2004-09-01), None
patent: 2004-300012 (2004-10-01), None

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