Piezoelectric thin film device having an additional film...

Details Piezoelectric thin film device having an additional film... Piezoelectric thin film device having an additional film...

2007-03-02

2009-10-27

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S322000, C310S326000

Reexamination Certificate

active

07609133

ABSTRACT:
An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

REFERENCES:
patent: 3585418 (1971-06-01), Koneval
patent: 5617065 (1997-04-01), Dydyk
patent: 6150703 (2000-11-01), Cushman et al.
patent: 6424237 (2002-07-01), Ruby et al.
patent: 6788170 (2004-09-01), Kaitila et al.
patent: 7161447 (2007-01-01), Nomura et al.
patent: 7199683 (2007-04-01), Thalhammer et al.
patent: 7230511 (2007-06-01), Onishi et al.
patent: 7423501 (2008-09-01), Kim et al.
patent: 2003-318695 (2003-11-01), None
patent: 2004-104449 (2004-04-01), None
patent: 2004-120494 (2004-04-01), None

Affiliated with

Also associated with

Rating

Piezoelectric thin film device having an additional film... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric thin film device having an additional film..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric thin film device having an additional film... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4101830