Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2007-03-02
2009-10-27
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C310S322000, C310S326000
Reexamination Certificate
active
07609133
ABSTRACT:
An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.
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Osugi Yukihisa
Tai Tomoyoshi
Yamaguchi Shoichiro
Burr & Brown
NGK Insulators Ltd.
Summons Barbara
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