Piezoelectric thin film device having an additional film...

Wave transmission lines and networks – Coupling networks – Electromechanical filter

Reexamination Certificate

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C310S322000, C310S326000

Reexamination Certificate

active

07609133

ABSTRACT:
An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

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patent: 2003-318695 (2003-11-01), None
patent: 2004-104449 (2004-04-01), None
patent: 2004-120494 (2004-04-01), None

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