Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-01-29
2008-01-29
Martin, J. San (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S360000, C310S361000, C310S363000, C310S364000
Reexamination Certificate
active
11043257
ABSTRACT:
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
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Abe Kazuhide
Hasunuma Masahiko
Itaya Kazuhiko
Kawakubo Takashi
Nagano Toshihiko
Kabushiki Kaisha Toshiba
Martin J. San
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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