Piezoelectric thin film device and method for manufacturing...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

C310S360000, C310S361000, C310S363000, C310S364000

Reexamination Certificate

active

11043257

ABSTRACT:
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

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