Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-06-21
2011-06-21
Rosenau, Derek J (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S363000, C310S370000
Reexamination Certificate
active
07965021
ABSTRACT:
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention includes: a LaNiO3film having a (001) orientation; an interface layer having a (001) orientation and composed of a compound represented by a chemical formula ABO3(where A is represented by (Bi,Na)1-xCx(0≦x≦1), B is Ti or TiZr, and C is an alkali metal other than Na); and a (Bi,Na,Ba)TiO3film having a (001) orientation. The LaNiO3film, the interface layer, and the (Bi,Na,Ba)TiO3film are laminated in this order.
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Adachi Hideaki
Fujii Eiji
Harigai Takakiyo
McDermott Will & Emery LLP
Panasonic Corporation
Rosenau Derek J
LandOfFree
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