PIEZOELECTRIC THIN FILM AND METHOD FOR PREPARATION THEOF,...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C347S068000

Reexamination Certificate

active

07001014

ABSTRACT:
A piezoelectric thin film can achieve a large piezoelectric displacement. A chemical composition of the piezoelectric thin film is expressed by Pb1+a(ZrxTi1−x)O3+a(0.2≦a≦0.6 and 0.50≦x≦0.62). The crystal structure of the piezoelectric thin film is a mixture of a perovskite columnar crystal region (24) having an ionic defect in which a portion of the constitutive elements of an oxygen ion, a titanium ion, and a zirconium ion is missing and a perovskite columnar crystal region (25) of stoichiometric composition having no ionic defect. This configuration allows a residual compressive stress in the crystal to be relaxed by the perovskite columnar crystal region (24) having an ionic defect, thus achieving a large piezoelectric displacement (displacement amount).

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Takayama, R., and Y. Tomita, “Preparation of Epitaxial Pb(ZRxTi1-x)O3Thin Films and Their Crystallographic, Pyroelectric, and Ferroelectric Properties”, J. App. Phys. 65(4), Feb. 15, 1989, pp1666-1670.
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