Piezoelectric substrate and surface acoustic wave filter...

Coating processes – Electrical product produced – Piezoelectric properties

Reexamination Certificate

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C029S025350

Reexamination Certificate

active

07846490

ABSTRACT:
Disclosed are a piezoelectric substrate and a surface acoustic wave (SAW) filter. A piezoelectric substrate10a includes a base member11including an oxide layer12with a plurality of grooves12a on one surface of the base member11; a buffer member13being formed on the oxide layer12to expose one end and another end of the oxide layer12; an insulating member14being formed on another surface of the base member11; and a piezoelectric member15being formed on the buffer member13. A SAW filter using the piezoelectric substrate10a, includes the base member11including the oxide layer12with the plurality of grooves12a on one surface; the buffer member13; the insulating member14; the piezoelectric member15; and a plurality of interdigital transducer (IDT) electrodes17and17being formed on the piezoelectric member15to receive an electrical signal, filter the electrical signal, and output the filtered electrical signal.

REFERENCES:
patent: 4684841 (1987-08-01), Este et al.
patent: 7213314 (2007-05-01), Abbott et al.
patent: 7432571 (2008-10-01), Lee et al.
patent: 7497962 (2009-03-01), Tokunaga

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