Piezoelectric structure, liquid ejecting head and...

Details Piezoelectric structure, liquid ejecting head and... Piezoelectric structure, liquid ejecting head and...

2006-05-30

2006-05-30

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000

Reexamination Certificate

active

07053526

ABSTRACT:
A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure.

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