Piezoelectric single crystal device

Details Piezoelectric single crystal device Piezoelectric single crystal device

2011-08-23

2011-08-23

Dougherty, Thomas (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S357000, C310S358000

Reexamination Certificate

active

08004164

ABSTRACT:
In a piezoelectric device that uses a vibration mode in a direction parallel to a polarization direction, a single crystal device that achieves an electromechanical coupling factor of 65% or more, which is more than the electromechanical coupling factor (about 60%) of the existing flat plane type piezoelectric single crystal device in that vibrational direction, is provided by performing certain treatment to its device plane. Specifically, a piezoelectric portion having a comb-shaped structure in which a plurality of slits are formed with a certain arrangement pitch on either of device planes whose polarization direction is their normal direction, the slits having a depth extending in a direction substantially perpendicular to the device plane and being filled with an insulating material, is formed to achieve 65% or more of an electromechanical coupling factor in a direction parallel to the polarization direction.

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Ultrasonic Technology; 1999; pp. 2-9; vol. 11; No. 9; Japan Industrial Publishing Co., LTD.

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