Piezoelectric shear wave resonator and method of making same

Details Piezoelectric shear wave resonator and method of making same Piezoelectric shear wave resonator and method of making same

1986-09-30

1988-01-12

Salce, Patrick R.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310346, 310360, H01L 4108

Patent

active

047193832

ABSTRACT:
An acoustic shear wave resonator comprising a piezoelectric film having its C-axis substantially inclined from the film normal such that the shear wave coupling coefficient significantly exceeds the longitudinal wave coupling coefficient, whereby the film is capable of shear wave resonance, and means for exciting said film to resonate. The film is prepared by deposition in a dc planar magnetron sputtering system to which a supplemental electric field is applied. The resonator structure may also include a semiconductor material having a positive temperature coefficient of resonance such that the resonator has a temperature coefficient of resonance approaching 0 ppm/.degree.C.

REFERENCES:
patent: 3634787 (1972-01-01), Newell
patent: 4456850 (1984-06-01), Inoue et al.
patent: 4556812 (1985-12-01), Kline et al.

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