Piezoelectric SAW device with a corrugated surface

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310313B, 333195, 333153, H01L 4108

Patent

active

046349146

ABSTRACT:
An acoustic surface wave device is configured as a bandstop filter. The device has groups of sinusoidal corrugations cut into the top surface of a piezoelectric substrate between the input and output sets of interdigital transducers. The groups of corrugations selectively scatter certain surface acoustic wave spectral components traveling between the input and output transducers. The scattered components are converted to bulk vibration and do not impinge upon the output transducer; other components travel from input to output transducer relatively undiminished. Thus, a band of scattered surface acoustic spectral components is filtered from the input spectrum.

REFERENCES:
patent: 4290033 (1981-09-01), Kagiwada et al.
patent: 4388146 (1983-01-01), Ballato
patent: 4389275 (1983-06-01), Ballato
P. V. H. Sabine, "Rayleigh-Wave Propagation on a Periodically Roughened Sace," Electronics Letters, vol. 6, No. 6, 19 Mar. 1970, p. 1491.
Lukaszek and Ballato, "What SAW Can Learn from BAW: Implications for Future Frequency Control . . . ", Proc. 1980 IEEE Ultrasonics Symposium, pp. 173-183, Nov. 1980.
Ballato, "Transduction of Surface Acoustic Waves by Interdigital Arrays . . . ", Tech. Report, ECOM-4359, U.S. Army Electronics Comm., Oct. '75.
Rischbeiter, F., "Measurements of Surface Waves in Solids," Acustica, 1965, 16, pp. 75-83.
Vig et al., "Etching Studies on Singly and Doubly Rotated Quartz Plates," Proc. 33rd An. Freq. Control Symp., pp. 351-358, 1979.

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