Piezoelectric resonators on a differentially offset reflector

Details Piezoelectric resonators on a differentially offset reflector Piezoelectric resonators on a differentially offset reflector

1999-07-27

2000-08-22

Ramirez, Nestor

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310367, H01L 4108

Patent

active

061077216

ABSTRACT:
Piezoelectric resonators utilizing a differentially offset reflector. One or more piezoelectric resonators are supported upon a substrate by one or more intervening layers of material, which intervening layers of material act as a reflector. The reflector isolates the resonators from the substrate. A portion of one or more of the intervening layers of material includes a differential layer of material, which differential layer shifts the resonant frequencies of the resonators that overlie the differential layer as compared with the resonant frequencies of those resonators that do not overlie the differential layer of material.

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patent: 5962955 (1999-10-01), Tsukuda et al.
patent: 5969463 (1999-10-01), Tomita et al.

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