Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-06-14
2005-06-14
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S334000, C310S346000
Reexamination Certificate
active
06906451
ABSTRACT:
A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2and Al2O3, respectively, Al2O3having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.
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Fujino Hiroyuki
Hayashi Takashi
Kawamura Hideki
Nakamura Daisuke
Nomura Tadashi
Budd Mark
Keating & Bennett LLP
Murata Manufacturing Co. Ltd.
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