Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2006-09-26
2006-09-26
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S187000, C333S189000, C029S025350
Reexamination Certificate
active
07113055
ABSTRACT:
A piezoeletric resonator includes: a substrate; a lower electrode formed on or above the substrate; a piezoeletric body formed on or above the lower electrode; an upper electrode formed on or above the piezoeletric body; and a cavity under a vibrating portion formed by the lower electrode, the piezoeletric body, and the upper electrode. Where a resonant frequency of vibration with a thickness of the vibrating portion being a half of a wavelength is taken as fr, an average of ultrasonic velocity in a material forming the cavity is taken as Vc, and a value determined based on the resonant frequency fr and the average of ultrasonic velocity Vc is taken as λc (=Vc/fr), a depth of the cavity is set so as to be equal to or larger than n×λc/2−λc/8 and equal to or smaller than n×λc/2+λc/8.
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Nakamura Hiroyuki
Nakatsuka Hiroshi
Onishi Keiji
Yamaguchi Hiroshi
Yamakawa Takehiko
Summons Barbara
Wenderoth , Lind & Ponack, L.L.P.
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