Piezoelectric resonator, filter, and duplexer

Details Piezoelectric resonator, filter, and duplexer Piezoelectric resonator, filter, and duplexer

2007-08-21

2007-08-21

Martin, J San (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000, C310S335000

Reexamination Certificate

active

10938537

ABSTRACT:
A piezoelectric resonator of the present invention is structured such that on a substrate5having a cavity4formed therein, a lower electrode3, a piezoelectric body1, a spurious component control layer16, and an upper electrode2are formed in this order from bottom up. The spurious component control layer16is a layer for controlling a spurious frequency, and composed of, for example, a metallic material, a dielectric material, or a piezo electric material. By additionally providing the spurious component control layer16, it is made possible to cause variation of the spurious frequency due to unwanted variation to become greater than variation in resonance frequency of the main resonance of the piezoelectric resonator. Thus, it is possible to realize a piezoelectric resonator having an admittance frequency response where no spurious component occurs between resonance frequency fr and antiresonance frequency fa.

REFERENCES:
patent: 4456850 (1984-06-01), Inoue et al.
patent: 5821833 (1998-10-01), Lakin
patent: 2004/0056735 (2004-03-01), Nomura et al.
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patent: 2004304704 (2004-10-01), None
K.M. Lakin, et al., “Temperature Compensated Bulk Acoustic Thin Film Resonators”, TFR Technologies, Inc., 2000 IEEEE Ultrasonics Symposium, pp. 855-858.

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