Piezoelectric resonator element, piezoelectric device,...

Details Piezoelectric resonator element, piezoelectric device,... Piezoelectric resonator element, piezoelectric device,...

2007-10-09

2007-10-09

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S370000

Reexamination Certificate

active

10976246

ABSTRACT:
A piezoelectric resonator element is provided including a base portion and a plurality of resonating arms extending from the base portion. A notch part is formed in the base portion. Grooves are formed in the front and back surfaces of the resonating arms. A driving electrode is provided at least in the grooves of the resonating arms. The driving electrode has a lower layer and an electrode layer formed on the lower layer. The thickness t of the lower layer is in the range 0.07<t<0.3 micrometers.

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