Piezoelectric resonator and method for fabricating the same

Details Piezoelectric resonator and method for fabricating the same Piezoelectric resonator and method for fabricating the same

1997-04-15

1999-07-27

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310359, 310333, 310368, 310320, H01L 4108

Patent

active

059295554

ABSTRACT:
A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.

REFERENCES:
patent: 5319324 (1994-06-01), Satoh et al.
patent: 5647932 (1997-07-01), Taguchi et al.

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