Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-04-03
2007-04-03
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S324000, C310S365000
Reexamination Certificate
active
10950816
ABSTRACT:
A piezoelectric resonator is provided which is capable of acquiring an excellent Q characteristic while letting a film thickness of an upper electrode be larger. The piezoelectric resonator has a lower electrode and an upper electrode with a piezoelectric film being sandwiched between them. By applying a voltage between the lower and upper electrodes to let a bulk acoustic wave propagate through inner portions of the piezoelectric layer, a signal having a specified resonant frequency is obtained. The standing wave has a first wave loop at an interface on a side opposite to the piezoelectric film of the upper electrode and a wave node and a second wave loop in inner portions of the upper electrode directing from the interface toward the piezoelectric film. The film thickness of the upper electrode obtained when a wavelength of a standing wave is defined as “λ” is 0.4λ to 0.7λ.
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Dougherty Thomas M.
McGinn IP Law Group PLLC
TDK Corporation
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