Piezoelectric resonating device

Details Piezoelectric resonating device Piezoelectric resonating device

1985-03-08

1987-02-10

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310324, H01L 4108

Patent

active

046425080

ABSTRACT:
The present invention provides a piezoelectric thin-film resonator comprising a non-piezoelectric film layer formed on a substrate, a lower electrode, a piezoelectric film layer and an upper electrode. An air-gap layer is formed between the non-piezoelectric film and the substrate to facilitate vibration of the piezoelectric film layer at the resonate frequency. The resulting resonating device is mechanically strong while at the same time being capable of operating at high frequency.

REFERENCES:
patent: 3486046 (1969-12-01), Zalar
patent: 4456850 (1984-06-01), Inoue et al.
patent: 4502932 (1985-03-01), Kline et al.
patent: 4517486 (1985-05-01), Andrews
patent: 4531267 (1985-07-01), Royer
1982 Ultrasonics Symposium--IEEE Cat. #02C1-1 1020-4, p. 466, Thin Film Resonators and Filters--K. M. Lakin et al.

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