Piezoelectric pumps

Details Piezoelectric pumps Piezoelectric pumps

1997-02-18

1998-08-25

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 310331, H01L 4108

Patent

active

057986002

ABSTRACT:
The present invention is directed to an electro-motional device, specifically piezoelectric pumps. More specifically, the present invention is directed to various piezoelectric pumps such as diaphragm pumps, double acting piston pumps, peristaltic pumps or centrifugal pumps.

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