Piezoelectric pressure sensor

Details Piezoelectric pressure sensor Piezoelectric pressure sensor

1982-03-30

1984-05-01

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 73720, 310366, 361283, G01L 908, G01L 912

Patent

active

044453841

ABSTRACT:
A pressure sensor comprising a piezoelectric material formed in a geometry which provides a piezoelectric output signal when subjected to a pressure. The piezoelectric material also has a pyroelectric output signal. The present sensor further comprises conductive contacts having a geometry for enhancing the piezoelectric output signal and for substantially eliminating the pyroelectric output signal.

REFERENCES:
patent: 2614416 (1952-10-01), Hollmann
patent: 2967957 (1961-01-01), Massa
patent: 3940974 (1976-03-01), Taylor
patent: 4060729 (1977-11-01), Byer et al.
patent: 4370583 (1983-01-01), Ljung
patent: 4376919 (1983-03-01), Konno et al.
"Thin Film ZnO-MOS Transducer with Virtually DC Response" by P. L. Chen et al. IEEE 1980 Ultrasonics Symposium.
"A Monolithic Capacitive Pressure Sensor with Pulse-Period Output" by Craig S. Sander et al., IEEE Transactions on Electron Devices, May 5, 1980.
"Low-Cost Transducer Opens Up New Uses" by Frank Massa, Electronics, May 27, 1960.

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