Piezoelectric pressure sensor

Details Piezoelectric pressure sensor Piezoelectric pressure sensor

1991-03-27

1993-05-11

Woodiel, Donald O.

Measuring and testing

Volume or rate of flow

By measuring vibrations or acoustic energy

73720, 73754, 73DIG4, G01F 132

Patent

active

052091252

ABSTRACT:
A vortex sensor 14 measures a flow rate of a fluid flowing through a flow passage by detecting alternating pressure variations 26a and 28a generated by a shedding body 16 placed in the flow passage. The vortex sensor 14 includes a sensor housing 32 enclosing piezoelectric sensing elements 62, 64 which are acted on by a movable member 30. The lifetime of the sensing elements in the closed interior is enhanced by providing surface barriers, oxidizing exposed interior surfaces, or providing a gas reservoir. In applications where fluid leakage may be accepted, a controlled leak restrictor provides a limited rate diffusion path to the atmosphere allowing a minimum partial pressure of oxygen to be maintained.

REFERENCES:
patent: 3269175 (1966-08-01), Sprosty
patent: 4258565 (1981-03-01), Sawayama et al.
patent: 4262544 (1981-04-01), Herzl
patent: 4437350 (1984-03-01), Tamura et al.
patent: 4475405 (1984-10-01), Corpron et al.
patent: 4526040 (1985-07-01), Matsubara
patent: 4559832 (1985-12-01), Burlage et al.
patent: 4776222 (1988-10-01), Lew
patent: 4862750 (1989-09-01), Nice
The Electrical Conductivity of LiNbO.sub.2, G. Bergmann, 1968, Gas Flow Restrictors and Controlled Leaks, Mott Metallurgical Corporation.

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